Computed Tomography and Metrology

Fraunhofer Institute for Integrated Circuits

Computed Tomography and Metrology

CT und Messtechnik 

Individual solutions for complex measurement tasks are our excellence. In cooperation with partners and customers we are developing custom-fit measuring methods for the non-destructive inspection of security-relevant and high-quality industrial components.

Computed Tomography as Measuring Method

Non-destructive dimensional measuring of inner and outer component structures using computed tomography (CT) serves the inspection of production and manufacturing tolerances.
 
The business activities of the EZRT are covering the entire process chain, ranging from precise dimensional measurement to geometrical evaluation concerning shrinkage and distortion.
 
Individual solutions for complex measurement tasks are developed using an accurate acquisition strategy which is closely coordinated with the customer.

Savings Potential

Using these solutions working cycles can be optimized. The following saving potentials result:

  • Faster process cycle
  • Lower manufacturing costs
  • Reliable quality control

Customer contact

Through close customer contact and intensive collaboration measurement strategies can be adapted ideally towards the measurement task.

We offer:

  • Execution of CT measurements
  • Execution of reference measurements using a tactile CMM
  • Analytical CT simulations using Scorpius XLab® to support measuring and acquisition planning
  • Metrological evaluation of dimension, form and position:
    • Measurment of single elements
    • Fitting of real geometries
    • Actual/nominal value comparison (CAD, reference data)
  • Surface extraction (STL generation)
  • Surface recirculation (reverse engineering)
  • Estimation of measurement uncertainty
  • Feasibility studies