Computed Tomography and Metrology

Fraunhofer Institute for Integrated Circuits

Measurement Uncertainty

The determination of the measurement uncertainty is crucial for the accuracy of measurement.

Task Specific Measurement Uncertainty

A measurement result without measurement uncertainty (MU) is incomplete. To determine a task specific MU the experimental method (DIN ISO/TS 15530-3) can be used by conducting 20 measurements. Guidelines and standards for the determination of the measurement uncertainty in CT are developed by independent organizations (e.g. PTB).
The task specific MU can be determined by the experimental method within a feasibility study on request.

Analysis of Influence Quantities in Metrology

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Real CT measurements are prone to various effects and influences which determine the result of the metrological measurement. Using test bodies calibrated by tactile means and by using data from simulations it is possible to examine those factors systematically.

Analytical CT Simulations Using Scorpius XLab®

Messunsicherheit_CTSim

The EZRT developed CT simulation software is based on a raytracing method. The attenuation of the X-ray spectrum due to material penetration is observed from the source up to the detector and can be computed analytically.








The fields of application of the CT simulation are:

  • Supporting measurement planning and image acquisition
  • Objective determination of the optimal acquisition parameters
  • Identification and analysis of influence quantities
  • Estimation of measurement uncertainty
  • Training
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