Technology
Fraunhofer Institute for Integrated Circuits
Computer Tomography (CT)
The computed tomography (CT) is a tool permitting the non-destructive and contact-free visualization of concealed structures of objects. We apply computed tomography both to the reconstruction of individual layers (2D) and to the reconstruction of complete volumes (3D). Due to the application of state-of-the-art technologies and faster algorithms we achieve spatial resolutions of down to 1 µm.
Industrial 3D computed tomography
This system enables us to detect deviations in density and defects as well as a characterization regarding the kind, geometry and position of those deviations or defects in the object. Moreover concealed inner structures can be measured. The representation of any section from the completely reconstructed volume data as well as a spatial representation of individual volume areas are made possible by software modules.
The industrial 3D computed tomography enables manufacturers to develop new products and production methods faster and to inspect and optimize the quality of their products. The 3D CT is a very fast measuring technique compared to the conventional CT which provides only one section image per measurement. The industrial CT can be optimized for specific applications to the extent of a process-integrated inspection technique. Resolutions in the range of µm are obtained by means of high-resolution detectors and sources.
The main application ranges of this technology are traffic engineering, cast materials, plastics, rubber and automobile industry.
Due to a modular setup and an open system architecture the industrial computed tomography covers a wide range of applications. By changing and adapting individual modules, user-specific CT systems can be designed or existing X-ray systems can be upgraded to CT systems.
Volumetric measurement and reconstruction, a fast reconstruction algorithm as well as the use of fast, PC-based computer architectures permit a high inspection throughput. The modular structure and the use of new system components results in high inspection dynamics, reduced costs and higher functionality. Application-specific 3D CT systems are designed in cooperation with industrial partners.
Planar computed tomography
The planar computed tomography (PCT) can be applied for objects that cannot be inspected by means of the axial computed tomography due to their geometry. This method permits both the reconstruction of individual layers (2D) and the reconstruction of complete volumes (3D). A resolution of up to 10 µm within the layers is achieved by the application of state-of-the-art X-ray and detector technologies (e.g. high-resolution sources and flat panel detectors as well as advanced algorithms). Thus, the system visualizes deviations in density and defects which can then be characterized with respect to their geometry and position in the object. The planar computed tomography permits the inspection of new products and optimisation of production processes.
The main application fields of this technology are the production and further processing of electronic components as well as of composite materials.
Typical applications are inside structures of electronic components, connection technologies (Flip-Chip, µBGA, BGA, MCM, COB), especially on double-sided printed circuit boards and individual layers of multilayer circuit boards.
The reconstruction of several layers from one set of projections is possible with our digital tomosynthesis, while traditional laminography generates only one section per measurement. Software modules permit the representation of the reconstructed layers (2D representation), but also the spatial reproduction of the entire reconstruction volume (3D representation) or of partial volumes.
In cooperation with our industrial partner (feinfocus), this method called planar computed tomography was integrated in a system for industrial applications. The modular architecture and the use of brand-new components in this system called µ-3D Visualiser result in high inspection dynamics, reduced costs and a high functionality. 2D top views and inclined views as well as image sequences can be used for the reconstruction.
Several algorithms are available for the reconstruction. Due to the flexible 3D technology the user can chose the volume, the geometric magnification as well as the geometric resolution according to his requirements.
Set Bookmark